Organic thin film deposition process

OLED device in a high vacuum deposition chamber plurality of organic material film, the film quality is related to the quality and life of the device key. In the vacuum chamber has a plurality of heating boat evaporation sources and the corresponding thickness monitoring system, graphic lcd 128x64 ITO glass substrate fixing means, and the metal mask means (Mask). A relatively high vapor pressure organic materials, the evaporation temperature at 100-500 ℃ between, on their characteristics:
1, high vapor pressure (150-450 ℃).
2, easy to decompose under high temperature conditions, volatility.
3, good thermal conductivity foam state.
Depositing an organic material film in the evaporator, the evaporation rate is controlled lose 3-5Å / s, so that the substrate of Φ60 mm film uniformity range of up to 350Å ± 25Å. Heating the boat with good thermal conductivity, easy to control the evaporation rate. Common heating molybdenum boat and tantalum metal heating boat, in order to make more uniform heating, plus quartz boat cover, that the heating be buffered. During the vapor deposition of organic material film, generally the substrate kept at room temperature, to prevent damage to the organic material film temperature, evaporation rate should not too fast or too slow, uneven thickness of the film is too thick. Evaporation of a variety of materials were carried out in several vacuum chamber, to prevent cross-contamination. The production of the color OLED device, comprising an organic dopant material film formation,Lcd display modules to take dopant material with the matrix material of the evaporation process, the general control of dopant materials 0.5-2% (of the number of moles of the matrix material ), required in the control matrix material and evaporation to the strict control of the dopant concentration in the matrix material.